THE ELECTRICAL AND OPTICAL PROPERTIES OF THE INDIUM TIN OXIDE (ITO) LAYER OBTAINED BY THE MAGNETRON SPUTTERING METHOD ARE AS FOLLOWS
A.A. Rajabli
2024   C   az   p.75-77

ABSTRACT

The Indium Tin Oxide (ITO) layer belongs to the class of Transparent Conductive Oxides (TCO) and was obtained by the magnetron sputtering method. For this, ceramic targets consisting of a mixture of indium oxide (In2O3) and tin oxide (SnO2) were used. In the obtained Glass/ITO structure, electrophysical properties such as the dependence of charge carriers' mobility on their concentration and the material's resistance, as well as the optical properties of the layer, including the conductivity, reflection, and absorption of light depending on the photon's energy, were studied. The results have been explained.

Keywords: Transparent conductive oxides, indium oxide, tin oxide, Indium Tin Oxide (ITO), magnetron sputtering
DOI:10.70784/azip.3.2024C75

Received: 2024
Internet publishing: 2024

AUTHORS & AFFILIATIONS

Institute of Physics Ministry of Science and Education Republic of Azerbaijan, 131 H.Javid ave. Baku, AZ-1073, Azerbaijan
E-mail: rajabli.alovsat@mail.ru

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