2023   03   en   p.19-23 S.A. Aliyev, F.E. Mammadov, E.M. Akberov, I.I. Gurbanov, A.A. Badalov, Sh.O. Eminov,
Main elements and characteristics of electrohydrodynamic ion sources based on InSb


For the first time, the method of preparation of the main constructive elements of the ion source used for obtaining ion beams with high current density based on InSb and InSb0·98Bi0·02 was developed and the volt-ampere characteristic of its ion current was measured. The material of the needle, which is the main element of the source, was selected according to the working substance (InSb and InSb0·98Bi0·02), the needle was sharpened by mechanical and chemical methods, and then wetted in the melt of the working substance at 550°C in a vacuum. The sharpened and wetted needles are placed in a closed graphite container, which is another element of the ion source, with the working substance inside. During the process, we ensured that the tip of the needle extended into the ion emission zone. Batches of InSb and InSb0·98Bi0·02 ions with different mass and charge were obtained in the prepared ion source.

Keywords: electrohydrodynamic sharp ion source, working substance, liquid metal ion source.
PACS: 29.25.Ni; 52.25.Tx; 81.16.Rf


Received: 07.07.2023


Institute of Physics, Ministry of Science and Education of the Republic of Azerbaijan, 131, G. Javid Avenue, Baku, AZ 1143, Azerbaijan
E-mail: sabir.eliyev.1950@mail.ru

Graphics and Images




[1]   V.T. Cherepin. Ion microprobe analysis. Kiev, Naukova Dumka, 1992.
[2]   V.G. Dudnikov. Rev. Sci. Instrum. 67 915, 1996.
[3]   A.I. Zhakin. Phys. Usp. 56 141, 2013.
[4]   L. Bischoff et. al. Appl. Phys. Rev. 3 021101, 2016.
[5]   J. Gierak at. el. J. Vac. Sci. Technol. B. 36 06J101, 2018.
[6]   N. Bassim, K. Scott, L.A. Giannuzzi. MRS Bull. 39 317, 2014.
[7]   L. Bruchhaus et.al. Appl. Phys. Rev. 4 011302, 2017.
[8]   P. Mazarov, V.G. Dudnikov, A.B Tolstoguzov. “Electrohydrodynamic emitters of ion beams” Phys. Usp. 63, 1219–1255, 2020
[9]   Tajmar et al. Ultramicroscopi 109 442, 2009.
[10]  G. Hlawacek, A. Göltzhauser. (Eds) Helium ion Mikroskopi (Cham: Springer İntern. Publ., 2 016)
[11]  R.G. Forbes, Mair G.L.R., in Handbook of Charged Particle Optics (Ed. J. Orloff) 2nd ed. (Boca Raton, FL: CRC Press, Taylor and Francis, 2009, p. 29.
[12]  Bell A.E., Swanson L.W. Appl. Phys. A 41 335, 1986.