2023   04   en   p.03-06 Sh.O. Eminov, S.A. Aliyev, F.E. Mammadov, I.I. Gurbanov, E.M. Akberov, J.A. Guliyev,
A.A. Badalov,
The radial distribution of current density in an electrohydrodynamic ion source based on the InSn alloy


The radial distribution of current density from the center of the beam to the edges across the radius of the emission field was investigated using a miniature probe target placed at a specific distance from the emission point at various beam current values from a liquid metal ion source with InSb as the working substance. It has been observed that despite the consistent geometric dimensions of the emission area at various emission current values, the current density decreases at measurement points from the center of the beam towards the edges. The experimental results provide the maximum opportunity to adjust the dimensions of thin layers deposited on various substrates using the ion source, as well as to ensure uniform thickness distribution across the surface of the samples.

Keywords: ion source, working substance, ion beam, radial distribution, emission.
PACS: 29.25. Ni; 52.25 Th; 81.16. RF


Received: 22.09.2023


Institute of Physics, Ministry of Science and Education of the Republic of Azerbaijan, 131 H. Javid Avenue, Baku, AZ 1143, Azerbaijan
E-mail: mammadov.f.e@gmail.com

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